“Parvus” a Micro-Parallel-Scara Robot for Desktop Assembly Lines

Abstract

The paper describes the development of a micro-parallel-SCARA robot adapted in size to MEMS products. The degree of miniaturization is optimized concerning a smaller structure but high accuracy in a workspace dimensioned to chip card size. The robot supports the mostly used four degrees of freedom with a base area of less than 150 × 150 mm2. It is the result of a cooperative project between the Institute of Machine Tools and Production Technology at the Technical University of Braunschweig and Micromotion GmbH. This company is an innovative manufacturer of miniaturized zero-backlash gears and actors, which are used as main drives of the robot.