Development of a Vibration Suppression GUI Tool Based on Input Preshaping and its Application to Semiconductor Wafer Transfer Robot

Abstract

Speed up movement to increase productivity may cause problems such as vibration. The tool we propose to suppress vibration is based on input preshaping, and its visual graphical user interface makes it easy to use. Testing of the tool at high speed suppressing vibration in a semiconductor wafer transfer robot confirmed the feasibility of our proposal.