Clean room robot with non-contact joints using magnetic bearings

Abstract

A new type of robot whose joints are supported by magnetic bearing mechanisms is proposed. This robot's joints are supported without mechanical contact. This avoids dust generation and oil lubrication which often create problems when robots are used in clean rooms, vacuum chambers, or in space. In addition to cleanliness and freedom from maintenance, the robot has a number of other advantages such as freedom from friction, and can accomplish functions such as micro-manipulation, force control, force sensing, active vibration control, and so on. A prototype manipulator with magnetic bearing joints has been made. The experimental results on the magnetic bearing joint show the feasibility of the proposed functions. A levitation experiment on the prototype robot link shows that the robot joints can be supported by a magnetic bearing mechanism and shows the feasibility of a robot with no mechanical contacts.