Sensitivity Voltage Analysis for Piezoelectric MEMS Gyroscope using Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium titanate (BaTiO3)

Abstract

MEMS Gyroscopes are used in many life applications such as drones, automobiles, and robotics. It measures the angular rate with Coriolis force. The signal for the rotation rate of the MEMS gyroscope can be produced by measuring the lateral motion resulting from the Coriolis force that occurs when the piezoelectric materials vibrate after being stimulated. Due to the different properties of piezoelectric materials and their impact on the sensitivity of the MEMS gyroscope with this difference, a model of the MEMS gyroscope was made using the COMSOL program. Aluminum Nitride (AlN), Zinc Oxide (ZnO) and Barium Titanate (BaTiO <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> ) were applied to the design and the sensitivity of the rotation rate was measured using each material after calculating the frequency response of the system and clarifying the best of these materials.