Desktop Micro Machining System by Multiple Micro Robots

Abstract

This paper describes the unique micro machining system performed by mutiple microrobots. These microrobots, which are composed of piezo elements and electromagnets, can move precisely with the manner of an inchworm on the steel plate. And these robots are equipped with the micro tools such micro drill and micro indentor to provide various micro works with much of flexible layout on the desktop. In this report, two typical applications are to be demonstrated. One of them is that two small robots can collaborate to make thin through-hole of 50 micron under the combination of global and local path control. Here the sample plate attached on the small robot can be positioned precisely to the other robot with micro drill tool, and the relative position between the sample and the tool can be controlled under the local navigation system to get such micro hole. The other application is that the small robot with micro hopping indentor can make array of micro indentation on the sample plate and automatically convey them under the microscope to inspect it