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Flexible capacitive pressure sensor array using acoustic-assisted fabrication of microstructures as surface and dielectric layers

Chengyao Xu, Deqing Mei, Lingfeng Zhu, Yancheng Wang

Year
2022
Citations
26

Keywords

Capacitive sensingMaterials scienceFabricationPressure sensorAcousticsOptoelectronicsSensor arrayDielectricLayer (electronics)Microstructure

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