OTHER
Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot
Ming Cong, Haiying Wen, Yu Du, Penglei Dai
- Year
- 2012
- Citations
- 29
Keywords
WaferCoaxialMechanical engineeringMaterials scienceRobotEngineeringComputer scienceOptoelectronicsArtificial intelligence
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