OTHER
Coaxial twin-shaft magnetic fluid seals applied in vacuum wafer-handling robot
Ming Cong, Haiying Wen, Yu Du, Penglei Dai
- 发表年份
- 2012
- 引用次数
- 29
关键词
WaferCoaxialMechanical engineeringMaterials scienceRobotEngineeringComputer scienceOptoelectronicsArtificial intelligence
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