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Characterization and control of a pneumatic microactuator with an integrated inductive position sensor

Michaël De Volder, Johan Coosemans, Robert Puers, Dominiek Reynaerts

Year
2007
Citations
31
Access
Open access

Keywords

MicroactuatorActuatorPneumatic actuatorPiston (optics)Position sensorHydraulic cylinderPneumatic cylinderMicroscale chemistryControl theory (sociology)Position (finance)

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