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Development of a miniature quadrupedal piezoelectric robot combining fast speed and nano-resolution

Jing Li, Jie Deng, Shijing Zhang, Yingxiang Liu

Year
2023
Citations
63

Keywords

PiezoelectricityWaferRobotResolution (logic)AcousticsElectronic circuitNano-Range (aeronautics)Computer scienceMaterials science

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