OTHER
Sensitive pressure sensors based on conductive microstructured air-gap gates and two-dimensional semiconductor transistors
Yun-Chiao Huang, Yuan Liu, Chao Ma, Hung‐Chieh Cheng, Qiyuan He, Hao Wu, Chen Wang, Cheng-Yi Lin, Yu Huang, Xiangfeng Duan
- Year
- 2020
- Citations
- 231
Keywords
TransistorMaterials scienceSensitivity (control systems)Pressure sensorOptoelectronicsSemiconductorAir gap (plumbing)Capacitive sensingPressure measurementSemiconductor device
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