Integrated Error Compensation for Robotic Arm Polishing of Cylindrical Aspheric Optical Components

摘要

This research tackles the intricate machining properties of cylindrical aspheric surfaces with a versatile adaption approach utilizing a robotic arm and a compact tool head, incorporating trajectory optimization. A three-step integrated error compensation framework was established as the core to address spatial inaccuracies in robotic systems, incorporating coordinate measuring machine (CMM)-based cylindrical generatrix offset correction, laser tracker-assisted progressive coordinate calibration, and contour profiler-driven feedback compensation. Complemented by a curvature-driven trajectory design, the method ensures uniform polishing coverage for non-uniform curvature surfaces. Experimental validation on S-TiH53 glass cylindrical aspheric components demonstrated a surface profile accuracy of peak-to-valley (PV) value ≤ 2 μm, meeting stringent requirements for high-power laser applications. This systematic approach enhances both efficiency and accuracy in robotic polishing, offering a viable solution for high-end optical manufacturing.