10-m in-door high-accuracy distance measurement using Si optical phased array for LiDAR application

摘要

The light detection and ranging (LiDAR) system is an emerging photonic technology in various applications such as autonomous vehicles, drones, robots, and high-precision 3D imaging. Since conventional LiDAR has employed mechanical beam-steering, the scanning speed is restricted and more power consumption is required. On the other hand, Silicon optical phased array (Si OPA) is a promising solution that can replace the mechanical scanning LiDAR due to the advantages of electrical scanning, small footprint, and low operating power. In this study, we demonstrated a 10 m distance measurement with Si OPA using the time-of-flight (ToF) method. We developed an optical pulse generator for high distance accuracy measurement utilizing an electrical pulse generator, radio frequency amplifier, diplexer, and distributed feedback laser diode to generate an optical output pulse with a 300 ps pulse width. The Si OPA was fabricated using complementary metal-oxide-semiconductor (CMOS) compatible processes with an 8-inch silicon-on-insulator wafer. Considering Si chip loss and beam-forming efficiency, the erbium-doped fiber amplifier was used at the front end of the input of Si OPA. An avalanche photodiode that has high speed and sensitivity was utilized as a receiver and the converted optical pulse was observed by a real-time oscilloscope. Using this ToF distance measurement platform, we achieved a 10 m distance measurement with a ranging error of 1.2 cm using Si OPA. Si OPA-based distance measurement platform will allow the realization of 3-dimensional image sensing and further improvement will enable high-accuracy long-distance measurement.