Ultra-Sensitive Flexible Piezoresistive Strain Sensor Simulation using Carbon Nanotube Composite

摘要

Developing flexible, highly sensitive strain sensors having an extensive working range is a pressing need for applications including healthcare, human motion, human-machine interface, robotics, etc. Herein, we focus on the complexities of modeling flexible piezo-resistive strain sensors with the COMSOL Multiphysics Finite Element Modeling (FEM) software. Due to its high gauge factor, the proposed model uses silicon as the substrate and carbon nanotubes (CNT) as the piezo-resistive material. The response of the proposed modeled sensor has been simulated for a strain range of 0-100% and analyzed concerning different parameters such as maximum displacement, electrical potential, von mises stress, sensitivity, and change in relative resistivity of the sensor. The simulation results reveal ultra-high gauge factors (from 11015 to 11105) in a strain range of 0-100% and the exceptional capability to monitor a wide range of human motions.