Novel Micro Robots and Micro Motors using Lorentz Force Driven Linear Micro Actuators based on Polymer Magnets

摘要

This paper reports on the development of several novel MEMS machines based on linear Lorentz force actuators. These were monolithically fabricated and integrate micro machined polymer magnets. Polymer magnets allow a highly flexible definition of magnetic areas, arbitrary shape and properties. Through the combination of these linear actuators with mechanical compliant structures using Epon SU-8, in-plane and out-of-plane micro positioners, micro motors and micro grippers were realized.