Design and Simulation of Tactical Grade Capacitive Based MEMS Vibratory Ring Gyroscope

摘要

MEMS Vibratory Ring Gyroscopes (VRGs) are highly sensitive owing to their in-plane symmetric structure that ensures mode matching. We present a VRG with Comb drive actuation that offers linearity in drive mode, and variable gap capacitive detection in sense mode provides a high-scale factor. The numerical analysis of the VRG is undertaken at atmospheric pressure. High linearity is observed between sense mode movement and change in capacitance, indicative of scale factor stability. It offers an operating range of more than 100 degrees per second (dps) and resolution of 0.002 dps. The VRG has been designed to suit the tactical grade mobility requirements of platform stabilization, robotics, and unmanned aerial vehicles.