P‐10.9: A Wearable Piezoelectric Sensor for Static‐dynamic Signal Detection and ITZO TFT Integrated Research

摘要

Wearable flexible electronic devices are increasingly becoming an important part of the future rolling touch screen, health care equipment, electronic skin and other fields. It is worth noting that piezoelectric sensors are widely used because of their self‐powered capability, fast response, and relatively simple circuits. Among them, Indium‐tin‐zinc oxide thin‐film transistor (ITZO TFT) has high field effect mobility, low energy consumption, and can be used as an amplifier for signal amplification of flexible sensing systems. In this paper, we constructed a flexible piezoelectric sensor (PZ) based on electrospun PVDF and hydrothermally assisted growth of ZnO nanorods. Besides, this PZ sensor has higher sensitivity than the individual PVDF piezoelectric sensor. The sensor can not only be used for detection of static objects, but also for the capture of tiny physiological signals of human body, such as vibration of vocal cords, pulse beat, etc., showing superiority in dynamic and static signal detection. At the same time, the sensor can be integrated with ITZO TFT, which can still achieve stable signal acquisition and show application prospects as future brain‐computer interface and intelligent robotics manufacturing.