AFM as a robot for automated nanohandling

摘要

Besides its ability of high resolution imaging, the Atomic Force Microscope (AFM) has been recognized as a valuable instrument for manipulation at the nanoscale within the last years. Promising applications of such AFM-based nanorobotic manipulation are e.g. the characterization of nanoentities such as CNTs and DNA or the prototypical fabrication of nanoscale components, devices, and systems based on such nanoobjects. One major problem that arises when the AFM is used as a robot for nanomanipulation is often the relativly low throughput induced by the sequential character of the AFM. Automation has proven to be a suitable means to increase the throughput of such AFM-based nanomanipulations and to achieve more reliable results. This paper discusses the usage of the AFM as a robot for na-nohandling in general and presents our latest results on automated nanomanipulation. The handling of CNTs on HOPG substrate as an example of the manipulation of single nanoentities and our strategies for automated nanohandling are dealt with. Moreover, the feasibility of AFM-based nanostructuring for the development of components for biosensors and the combination of an AFM with an SEM are demonstrated.