MEMS flexible conformal hydrophone based on heterogeneous integration technology

摘要

Purpose Human-induced marine environmental noise, such as commercial shipping and seismic exploration, is concentrated in the low-frequency range. Meanwhile, low-frequency sound signals can achieve long-distance propagation in water. To meet the requirements of long-distance underwater detection and communication, this paper aims to propose an micro-electro-mechanical system (MEMS) flexible conformal hydrophone for low-frequency underwater acoustic signals. The substrate of the proposed hydrophone is polyimide, with silicon as the piezoresistive unit. Design/methodology/approach This paper proposes a MEMS heterojunction integration process for preparing flexible conformal hydrophones. In addition, sensors prepared based on this process are non-contact flexible sensors that can detect weak signals or small deformations. Findings The experimental results indicate that making devices with this process cannot only achieve heterogeneous integration of silicon film, metal wire and polyimide, but also allow for customized positions of the silicon film as needed. The success rate of silicon film transfer printing is over 95%. When a stress of 1 Pa is applied on the x -axis or y -axis, the maximum stress on Si as a pie-zoresistive material is above, and the average stress on the Si film is around. Originality/value The flexible conformal vector hydrophone prepared by heterogeneous integration technology provides ideas for underwater acoustic communication and signal acquisition of biomimetic flexible robotic fish.