Liquid metal-based bio-inspired capacitive flow sensor

摘要

We present a liquid flow sensor inspired by cupula structures found on a variety of fish. Our 5mm x 5mm x 1.75mm artificial cupula uniquely comprises a pair of differential liquid metal capacitors encased in silicone. Deflection of the structure – manually or by fluid flow – increases capacitance on one side and decreases on the other. To fabricate the complex internal structure, a commercial 3D printer is used to create a mold out of a sacrificial wax-like material. After casting uncured rubber, internal mold structures are melted and dissolved away, leaving channels and voids for liquid metal vacuum injection. The measured sensitivity of ~0.05pF/mm is compared to theoretical capacitance versus deflection values based on kinematics. To test behavior under water flow, a custom flow channel consisting of a 7.5mm x 7.5mm cross-section is employed with rates up to 1L/min. The parabolic capacitive response as a function of flowrate is compared to analytic theory based on kinematics and drag as well as to fluid-structure interaction (FSI) simulations using COMSOL. This device has future applications in the control of bio-inspired soft robotics. [Work sponsored by the Office of Naval Research.]