A multi-layer electro elastic drive for micro and nano robotics

摘要

A multi-layer electro elastic drive of robotics is used in adaptive optics of compound telescope, scanning microscopy, interferometry and nanotechnology. For micro and nano robotics a multi-layer electro elastic drive is applied. The parametric model of a multi-layer electro elastic drive is determined. Its functions and matrix deformations are founded. The parameters of the multi-layer longitudinal PZT drive are determined.