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A Study on Wafer-Handling Robot with Coaxial Twin-Shaft Magnetic Fluid Seals

Ming Cong, Penglei Dai, Huili Shi

发表年份
2009
引用次数
6

关键词

BellowsWaferMechanical engineeringCoaxialRobotMaterials scienceSeal (emblem)MagnetRotational speedComputer science

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