A Closed-Loop 12bit CMOS-Integrated Stress Sensor System with 4bit Adjustable Sensitivity from 178 to 11 kPa/LSB at up to 22.5kS/s and 5bit Dynamic Range Adjustment

摘要

The increasing popularity of integrated stress sensors due to emerging fields such as Internet-of-Things (loT), robotics and predictive maintenance led to various implementations to exploit the piezoresistive property of silicon [1–4]. Required specifications differ severely depending on the intended field of application. Tactile applications are in need of high sampling rates to reduce latency, e.g. for slip detection, whereas for predictive maintenance applications sensitivity requirements might dominate. To cover a wide range of applications, hence specifications, this paper presents a complete sensor system with 32 integrated MOS stress sensors including 4bit programmable sensitivity and 5bit analog dynamic range adjustment at 12bit resolution (Fig. 23.4.1).