OTHER
Scheduling of time-constrained single-arm cluster tools with purge operations in wafer fabrications
Fenglian Yuan, Qingling Zhao, Bo Huang, Chunrong Pan
- 发表年份
- 2022
- 引用次数
- 7
关键词
PurgeWaferComputer scienceWafer fabricationScheduling (production processes)SchedulePetri netTransient (computer programming)Real-time computingDistributed computing
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