OTHER
A silicon-micromachined pin for contact droplet printing
J. Gin Fai Tsai, Zugen Chen, Shelby F. Nelson, Chang‐Jin Kim
- 发表年份
- 2003
- 引用次数
- 8
摘要
This paper reports the design and fabrication of a micromachined silicon pin that serves as a novel contact-printing tool. More specific application is in the DNA and protein microarray field for small and precise droplet printing onto a solid support. Our goal is to develop low cost, high performance silicon pins as simple replacement of the stainless-steel pins used in typical microarray robots. The test results show an average droplet size of 38 /spl mu/m in diameter, compared with over 100 /spl mu/m for the commercial pins, as well as more consistent droplet sizes.
关键词
SiliconFabricationMaterials scienceSurface micromachiningMicroelectromechanical systemsMicrofabricationOptoelectronicsRobotNanotechnologyComputer science
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