OTHER
Characterization and modeling of a piezoresistive three-axial force micro sensor
Nouha Alcheikh, C. Coutier, S. Giroud, Christophe Poulain, Patrice Rey
- 发表年份
- 2013
- 引用次数
- 10
关键词
Piezoresistive effectFootprintFinite element methodLinearityFabricationMaterials scienceCharacterization (materials science)HysteresisSensitivity (control systems)Microelectromechanical systems
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