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Hierarchical Arete Architecture‐Enabled Iontronic Pressure Sensor with High Linearity and Sensitivity

Yanxu Chen, Yuxiang Qin, Xueshuo Zhang, Anbo Zheng, Qing Xia

发表年份
2022
引用次数
11

摘要

Abstract Linearity is an indispensable factor to be considered when evaluating the characteristics of a pressure sensor. Although different kinds of advanced materials and microstructures are explored to enhance the device performances, the nonlinear response of sensors caused by the attenuation of sensitivity as pressure increases still needs to be further addressed. In this spotlight, a sensitive flexible iontronic pressure sensor with highly linear response is reported here. The design of its hierarchical arete architecture (HAA) not only inherits the high sensitivity of hierarchical microstructures in a wide pressure range but also achieves ultrahigh linearity. Experimentally the HAA iontronic sensor is prepared by using a simple and low‐cost polycrystalline silicon template, and it demonstrates a high sensitivity of 20.98 kPa −1 in a broad range (0–37.5 kPa) with R 2 up to 0.9921. Benefited from the combination of remarkable linearity, sensitivity, and other characteristics, practical applications around human health such as real‐time monitoring of tablets, recognition of respiratory airflows, and physiological signals detection are successfully demonstrated here. Based on these excellent performances, the HAA iontronic sensor can also be regarded as a promising choice in the fields of 5G communication, wearable devices, robotic intelligence, etc.

关键词

LinearitySensitivity (control systems)Wearable computerComputer sciencePressure sensorMaterials scienceOptoelectronicsElectronic engineeringEmbedded systemEngineering

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