Integrated PiezoMEMS actuators and sensors

摘要

The ability to combine both actuation and sensing technologies into one unified MEMS fabrication process is enabling for a wide variety of applications including high frequency filters, transformers and mm-scale robotics. This research demonstrates piezoelectric MEMS (PiezoMEMS) devices based on lead zirconate titanate (PZT) thin films including switchable resonators, transformers, and microflight actuators with integrated strain sensors. PiezoMEMS resonators and transformers combine actuation and sensing on a single device platform. Current research on PZT based resonators is focused on optimizing the performance for both high quality factor, Q, and low motional resistance. Resonators in the low tens of MHz can also be utilized as piezoelectric resonant transformers and are predicted to achieve AC/DC gains in the range of 2 to 8. In addition, strain sensors positioned at the cantilever root of PiezoMEMS microflight actuators provide direct feedback of the motional response of the actuated wing.