OTHER
Integrated system and control design of a one DoF nano-metrology platform
Rudolf Saathof, Markus Thier, Reinhard Hainisch, Georg Schitter
- 发表年份
- 2017
- 引用次数
- 28
关键词
MetrologyMechatronicsEngineeringVibrationBandwidth (computing)ActuatorLaser trackerStiffnessControl engineeringControl theory (sociology)
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