首页 /研究 /Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias
OTHER

Integrated 3-axis tactile sensor using quad-seesaw-electrode structure on platform LSI with through silicon vias

Yoshiyuki Hata, Yukio Suzuki, Masanori Muroyama, Takahiro Nakayama, Yutaka Nonomura, Rakesh Chand, Hideki Hirano, Y. Omura, Motohiro Fujiyoshi, Shuji Tanaka

发表年份
2018
引用次数
31

关键词

Capacitive sensingTactile sensorMicroelectromechanical systemsMaterials scienceChipSIGNAL (programming language)Shielded cableElectrical engineeringElectronic engineeringEngineering

相关论文

查看 OTHER 分类全部论文