Flexible pressure sensors with microstructures

摘要

Abstract Microstructured flexible pressure sensors featured with good mechanical properties, boosting a variety of sophisticated application scenarios, including electronic skin (e‐skin), soft robotics, wearable electronics, etc. This review is very focusing on the recent research progress of microstructured flexible pressure sensors. For better understanding the corresponding devices, different mechanisms, materials, preparation methods are briefly introduced at the beginning. And with highlighting the significance of microstructure for device performance, the microstructures of different configurations (e.g., pyramid, pillar, hemisphere) are introduced and discussed in detail through analyzing the influence of configuration characteristics and material properties. Finally, according to the existing problems in the application, the research directions of flexible pressure sensor are prospected. Currently, catering to the explosive and ineluctable growth of this intelligent world, considerable microstructured flexible pressure sensors have emerged but their development is still at very first stage. In this review, some guidelines and tunable methods are suggested for the microstructured flexible pressure sensors of wide practical use in the future.