The Feel of MEMS Barometers: Inexpensive and Easily Customized Tactile Array Sensors

摘要

This article presents a new approach to the construction of tactile array sensors based on barometric pressure sensor chips and standard printed circuit boards (PCBs). The chips include tightly integrated instrumentation amplifiers, analog-to-digital converters, pressure and temperature sensors, and control circuitry that provides excellent signal quality over standard digital bus interfaces. The resulting array electronics can be easily encapsulated with soft polymers to provide robust and compliant grasping surfaces for specific hand designs. The use of standard commercial off-the-shelf technologies means that only basic electrical and mechanical skills are required to build effective tactile sensors for new applications. The performance evaluation of prototype arrays demonstrates excellent linearity (typically <;1%) and low noise (<;0.01 N). External addressing circuitry allows multiple sensors to communicate on the same bus at more than 100 Hz per sensor element. Sensors can be mounted with as close as 3#5-mm spacing, and spatial impulse response tests show that linear solid-mechanics-based signal processing is feasible. This approach promises to make sensitive, robust, and inexpensive tactile sensing available for a wide range of robotics and human-interface applications.