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On-chip integration of vector force sensor based on AlGaInP micro-LEDs with interface light coupling modulated by microstructures

Jiansong Feng, Zhongqi Wang, Mengyuan Zhanghu, Xu Zhang, Yong Shen, Jing Yang, Zhibin Li, Bin Chen, Taihong Wang, Xiaolong Chen, Zhaojun Liu

Year
2024
Citations
1

Keywords

Light-emitting diodeOptoelectronicsCoupling (piping)ChipInterface (matter)Materials scienceOptical couplingOpticsOptical fiberElectrical engineering

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