OTHER
Modeling of solid–liquid coupling and material removal in robotic wet polishing
Jie Pan, Fan Chen, Meng Jin, Huan Zhao, Zhaocheng Dong, Donglin Pu, Peng Ruan
- Year
- 2023
- Citations
- 2
Keywords
PolishingAbrasiveMaterials scienceChemical-mechanical planarizationMechanicsFlow (mathematics)Volumetric flow rateFluentCoupling (piping)Composite material
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