Modeling and Simulation Method for a Belt-Driven SiliconWafer Transfer Robot Considering Static Friction

Abstract

In this study, we consider a modeling problem associated with belt-driven robots that transfer silicon wafers in the automated manufacturing of semiconductors to achieve high-speed and high-precision transfer control. We propose 1) a modeling method for the belt-driven robot that takes into account the dynamics of the belt and the static friction force, and 2) a calculation method for the static friction force. Using simulation experiments we confirmed that the proposed model can reproduce the actual trajectory deviation phenomenon that is observed in actual robots.