OTHER
High-fidelity simulation of integrated single-wafer processing tools for evaluation of scheduling algorithms
Woo Seok Kim, Young Ha Jeon, Sung Jo Kwak, Doo Yong Lee, Hyun Joong Yoon
- Year
- 2007
- Citations
- 3
Keywords
Computer scienceScheduling (production processes)RobotOpenGLSemiconductor device fabricationEmbedded systemProcess (computing)WaferOperating systemVisualization
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