Optimal scheduling of single-arm multi-cluster tools with two-space buffering modules

Abstract

A multi-cluster tool is composed of a number of single-cluster tools linked by buffering modules. The capacity of a buffering module can be one or two. Aiming at finding an optimal one-wafer cyclic schedule, this work explores the effect of two-space buffering modules on the performance of a multi-cluster tool. The tool is modeled by a kind of Petri nets. The dynamic behavior of robot waiting and tasks, process modules, and buffers is well captured by the net model. With the model, this work shows that there is always a one-wafer cyclic schedule that reaches the lower bound of the cycle time of a process-dominant tool. Furthermore, a constant-time algorithm is revealed to find such a schedule for the first time for such multi-cluster tools. An illustrative example is given to show the application and power of this new method.