Design and Application of Robot Vision Inspection System for Semiconductor Metal Target

Abstract

In this paper, a robot vision inspection system is designed. The vision system is installed at the end of the industrial robot, which is used to detect the surface defects of semiconductor metal targets online. We use the robot technology, combined with the vision inspection program control, so that the vision inspection system and the robot work together, to complete a high purity semiconductor metal target processing inspection task. We obtained the testing experimental data. After analysis, the system can completely replace the traditional manual testing, and improve the machining quality and efficiency of semiconductor metal target.