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Toward Inertial-Navigation-on-Chip: The Physics and Performance Scaling of Multi-Degree-of-Freedom Resonant MEMS Gyroscopes

Haoran Wen

Year
2019
Citations
3

Keywords

GyroscopeMicroelectromechanical systemsInertial frame of referencePhysicsChipScalingDegree (music)EngineeringElectrical engineeringOptoelectronics

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