Home /Research /Spatially selective biomolecules immobilization on silicon nitride waveguides through contact printing onto plasma treated photolithographic micropattern: Step-by-step analysis with TOF-SIMS chemical imaging

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Spatially selective biomolecules immobilization on silicon nitride waveguides through contact printing onto plasma treated photolithographic micropattern: Step-by-step analysis with TOF-SIMS chemical imaging

Katarzyna Gajos, Andrzej Budkowski, Panagiota Petrou, Kamil Awsiuk, Κωνσταντίνος Μισιακός, I. Raptis, Sotirios Kakabakos

Year: 2019
Citations: 4

Keywords

PhotolithographyMaterials scienceSurface modificationStreptavidinBiotinylationBiosensorSilicon nitrideBiomoleculeNanotechnologyLayer (electronics)

Spatially selective biomolecules immobilization on silicon nitride waveguides through contact printing onto plasma treated photolithographic micropattern: Step-by-step analysis with TOF-SIMS chemical imaging

Keywords

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