Scheduling and optimization of mixed-processing with multi-variety wafers in dual-armed cluster tools

Abstract

To improve the efficiency of wafer fabrication, this work addresses the scheduling and control problems of mixed-processing with multiple wafer types in cluster tools. Then, based on a developed Petri net (PN) model, it presents a general model for cluster tools with multiple wafer types and the conventional swap strategy. By analyzing the coordination mechanism between wafers processing and robot tasks, necessary and sufficient conditions are established to check the schedulability of the system that is operated by using the conventional swap strategy. If the system is not schedulable checked by such schedulability conditions, a constraint-guided heuristic algorithm and a conflicts-avoiding algorithm are developed to obtain a reasonable schedule. Finally, illustrative examples are presented to show the applications of the proposed method.