OTHER
Fabrication and characterization of a submillimeter-scale ultrasonic motor
Kohei Kikuchi, Mudassir Hussain, Tomoaki Mashimo
- Year
- 2023
- Citations
- 12
Keywords
Ultrasonic motorPiezoelectric motorStatorFabricationPiezoelectricityUltrasonic sensorSurface micromachiningTorqueVoltageMaterials science
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