Development of a scaled teleoperation system for nano scale interaction and manipulation

Abstract

A human-machine interface is proposed for teleoperated nano scale object interaction and manipulation. Design specifications for a bilateral scaled teleoperation system with slave and master robots, sensors, actuators, and control are discussed. Phantom and home-made haptic devices are utilized as the master manipulator, and a piezoresistive MEMS fabricated probe is selected as the slave manipulator, and topology and force sensor. A force reflecting servo type teleoperation control is chosen, and initial experiments are realized for interacting with silicon surfaces and nano structures. It is shown that fine structures can be felt on the operator's finger successfully.