OTHER
Towards understanding and restraining the mechanical relaxation effect in polishing silicon carbide with a detachable bonnet tool
Yifan Zhang, Jingbo Feng, Yuyang Zhao, Mengqi Rao, Yuehong Yin
- Year
- 2022
- Citations
- 21
Keywords
PolishingMaterials scienceAbrasiveCreepCeramicDrop (telecommunication)Composite materialSilicon carbideStress (linguistics)Surface roughness
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