OTHER
Atomic surface induced by novel green chemical mechanical polishing for aspheric thin-walled crucibles with large diameters
Xiangxiang Cui, Zhenyu Zhang, Chunjing Shi, Qibo Peng, Xiaoyu Liu, Xiuqing Liu, Hongxiu Zhou, Junyuan Feng, Wei Wen
- Year
- 2024
- Citations
- 34
Keywords
Materials scienceX-ray photoelectron spectroscopyPolishingSurface roughnessScanning electron microscopeChemical-mechanical planarizationRaman spectroscopyComposite materialAnalytical Chemistry (journal)Chemical engineering
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