OTHER
Integrated thin-film piezoelectric traveling wave ultrasonic motors
Gabriel L. Smith, Ryan Q. Rudy, Ronald G. Polcawich, Don L. DeVoe
- Year
- 2011
- Citations
- 60
Keywords
Ultrasonic motorTraveling waveUltrasonic sensorPiezoelectricityAcousticsMaterials scienceElectrical engineeringEngineeringPhysicsMathematics
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