OTHER
Efficient automatic polishing process with a new compliant abrasive tool
Meng‐Shan Tsai, Jian-Mi Huang
- Year
- 2006
- Citations
- 101
Keywords
PolishingAbrasiveSurface roughnessMaterials scienceTaguchi methodsChemical-mechanical planarizationSurface finishProcess (computing)Mechanical engineeringEngineering drawing
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