Characterization of ultra-fine surfaces produced by robot assisted polishing

摘要

Polishing is the final processing steps in many high precision applications as for example bearings, moulds and dies. The paper describes a new robot assisted polishing (RAP) machine and the characterization techniques employed to measure the polished surfaces. Focus is given to the comparison of different measuring principles applied to polished surfaces. Finally the progression of the surface topography during RAP polishing is investigated and documented.