An Ulta Precision Production System Organized by Miniature Robots (3rd Report). Development of Capillary Capturing Probe and Surface Clearing Operation.

摘要

This paper deals with the precise miniature robot which has been developed to perform surface clearing operation. The basic principle of this mechanism for precise locomotion is based on the combination of piezo elements and electromagnets for providing an inchworm manner. In order to capture such small objects on the surface, the unique capillary probe that the water in the tube can be pushed off by the magnetic piston and then the object can be taken in the water drop with the help of surface tension force was designed and fabricated. As a primaly experiment, it was confirmed that the capillary probe was successfully capable of capturing several small materials such as metal ball, particle and scraped paper. And the tiny robot with the capillary probe succeeded in capturing the small object on the surface and coveying it to the trash, and then throwing it away.