Fabrication of CNT nanosensors by combining micro-robotic spotting and DEP technologies

摘要

An automated carbon nanotubes (CNTs) microspotting system was developed for rapid and batch assembly of bulk multi-walled carbon nanotubes (MWNT) based nanosensors. By combining dielectrophoretic (DEP) and microspotting technique, MWNT bundles were successfully and repeatably manipulated between arrays of micro-fabricated electrodes. Preliminary experimental results showed that two different spotting methods were successful in forming CNTs between microelectrodes and the time required to form one CNT sensor was less than 1 second. This feasible batch manufacturable method dramatically reduces production costs and production time of nano sensing devices and potentially enable fully automated assembly of CNT and other nanowire based devices.